(NfIZIKO(B-(NHIMIQ MATERIALOW I PROCESSOW W MIKRO\LEKTRONIKE (B:s (NsBORNIK NAU^NYH TRUDOW (B/s - (NuGAJ(B, (Nq(B.(Na(B.s; (NwORONEVSKIJ GOSUDARSTWENNYJ UNIWERSITET IM(B. (NlENINSKOGO KOMSOMOLAs ((NwORONEV (B:s (NiZD(B-(NWO wORONEV(B. (NUN(B-(NTA(B,s, 1989)
Keywords: (NmIKRO\LEKTRONIKAs