(NrASPYLENIE TWERDYH TEL IONNOJ BOMBARDIROWKOJ (B:s (NfIZI^ESKOE RASPYLENIE ODNO\LEMENTNYH TWERDYH TEL (B/s - (NbERI[(B, (NrAJNERs; (NmOL^ANOW(B, (Nw(B.(Na(B.s ((NmOSKWA (B:s (NmIR(B,s, 1984)
(NwYP(B. 1 (1984 ; 336 (NS(B.) :s (NwYP(B. 2 (1986 ; 486 (NS(B.) :s (NrASPYLENIE SPLAWOW I SOEDINENIJ(B, (NRASPYLENIE POD DEJSTWIEM \LEKTRONOW I NEJTRONOW(B, (NRELXEF POWERHNOSTIs
(NaWT(B. (NUKAZANY W OGL(B.s
(NpEREWOD IZD(B.: Sputtering by particle bombardment. 1 / With contributions by H. H. Andersen, H. Z. Bay, R. Behrisch et. al. (Berlin etc., 1981)s
Keywords: (NtWERDYE TELA (B- (NdEJSTWIE IONIZIRU@]IH IZLU^ENIJs