(NkONSTRUKTORSKO(B-(NTEHNOLOGI^ESKIE OSNOWY PROEKTIROWANIQ POLOSKOWYH MIKROSHEM (B/s - (NgUDKOW(B, (Na(B.(Ng(B.s; (NdERGA^EW(B, (Nw(B.(Nf(B.s; (NbU[MINSKIJ(B, (Ni(B.(Np(B.s ((NmOSKWA (B:s (NrADIO I SWQZX(B,s, 1987)
(NbIBLIOGR(B.: (NS(B. 263 - 266 (90 (NNAZW(B.)s
Keywords: (NmIKROSHEMYs -- (NpROEKTIROWANIEs