(NfIZIKO(B-(NHIMI^ESKIE PROCESSY PRI PLAZMENNOM NAPYLENII I RAZRU[ENII MATERIALOW S POKRYTIQMI (B/s - (NmAKSIMOWI^(B, (NgEORGIJ gRIGORXEWI^s; (N{ATINSKIJ(B, (NwIKTOR fEDOROWI^s; (NkOPYLOW(B, (NwQ^ESLAW iWANOWI^s; (NaKADEMIQ NAUK ussrs ((NkIEW (B:s (NnAUK(B. (NDUMKA(B,s, 1983)
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Keywords: (NpLAZMENNOE NAPYLENIE (B- (NfIZIKO(B-(NHIMI^ESKIE PROCESSYs