(NpOLU^ENIE TONKOPLENO^NYH \LEMENTOW MIKROSHEM (B/s - (NdANILIN(B, (Nb(B.(Ns(B.s; (NhARLAMOW(B, (Nw(B.(Ns(B.s ((NmOSKWA(B, :s (N|LEKTRONIKA(B,s, 1977)
(NbIBLIOGR(B.: (NS(B. 128-134s
Keywords: (NmIKROSHEMYs